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1Published 2018Other Authors: “…Xie, Huikai, editor…”
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2D Lissajous
3D measurement
Cu/W bimorph
DMD chip
Huygens' metalens
LC micro-lenses controlled electrically
MEMS mirror
MEMS scanning micromirror
MEMS scanning mirror
MLSSP
NIR fluorescence
Optical communications
achromatic
angle sensor
bio-optical imaging
confocal
digital micromirror device
digital micromirror device (DMD)
dual-mode liquid-crystal (LC) device
echelle grating
electromagnetic actuator
electrostatic
electrothermal actuation
electrothermal bimorph
field of view (FOV)
flame retardant 4 (FR4)
fluorescence confocal
fringe projection
higher-order modes
infrared