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Related Subjects
CMOS
CMOS-MEMS
CMOS-NEMS
Hall effect
M3D
MEMS
MEMS characterization
MEMS modelling
MEMS relays
MEMS resonators
MEMS switches
MEMS-ASIC integration
NEM memory switch
NEMS
Sigma-Delta
application-specific integrated circuit (ASIC)
atomic force microscope
capacitive pressure sensor
chopper instrumentation amplifier
encapsulation
gas sensor
high-Q capacitive accelerometer
infrared sensor
interface circuit
magnetic field
magnetotransistor
mass sensors
mechanical relays
metal oxide (MOX) sensor
micro sensor