CMOS CMOS-MEMS CMOS-NEMS Hall effect M3D MEMS MEMS characterization MEMS modelling MEMS relays MEMS resonators MEMS switches MEMS-ASIC integration NEM memory switch NEMS Sigma-Delta application-specific integrated circuit (ASIC) atomic force microscope capacitive pressure sensor chopper instrumentation amplifier encapsulation gas sensor high-Q capacitive accelerometer infrared sensor interface circuit magnetic field magnetotransistor mass sensors mechanical relays metal oxide (MOX) sensor micro sensor