ATHOS soft X-ray beamline HBT Hall probe History of engineering & technology MMIC SIMO filter SiGe VCII active filters active inductor additive manufacturing analogue-to-digital conversion anti-aliasing filters anti-interference filter bandpass filter broadband noise conducted disturbances current mode defected ground structure (DGS) dielectric properties digital light processing filter finFET hairpin resonator inductorless internal coupling low-pass filter (LPF) low-pass filters low-voltage microwave dielectric ceramics