ITO thin films Nanoimprint lithography Research & information: general UV-NIL doping efficiency electronic transport filtered cathodic vacuum arc hierarchical structures liquid transfer imprint lithography low temperature deposition magnetron sputtering microstructure multilayer stack optical coatings optical constants optical micro- and nanostructures optoelectronic properties oxygen flow reactive magnetron sputtering reversal NIL rutile simulation spectrally selective absorber spectroscopic ellipsometry tin dioxide titanium oxide films transparent conductive oxide transparent heaters