AMPCVD CNTs Lorentzian plasmas NO oxidation RF plasma source Technology: general issues atmospheric pressure plasma bremsstrahlung carbon structures coulomb focusing dielectric barrier discharge dielectric barrier discharges diesel exhaust dusty plasma electrical discharge helical resonator hydrocarbon hydrogen plasma microdischarge microwave plasma oxidation degree of NOX plasma polymer-metal mesh composite foil radio frequency roll-to-roll processing selective etching state-controlling method